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Journal / Engineering / 金属辅助多孔硅和固体硅晶圆的电化学纳米压印…
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金属辅助多孔硅和固体硅晶圆的电化学纳米压印
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金属辅助多孔硅和固体硅晶圆的电化学纳米压印

Article DOI: 10.3791/61040-v • 09:18 min • February 8th, 2022
February 8th, 2022 •
1, 1, 1, 1
1The Polytechnic School, Arizona State University

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提出了一种金属辅助化学印迹的方案，将形状精度低于20 nm的3D微尺度特征印制到固体和多孔硅晶圆中。

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工程，第180期，纳米压印，电化学纳米压印，MACE，金属辅助化学蚀刻，硅光子学，微加工，微工程
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