Sputter Deposition

Sputter deposition is a physical vapor deposition technique that forms thin films by transferring material from a solid target onto a substrate, making it important for engineering coatings and microfabrication. In a vacuum chamber, an energized plasma, commonly containing argon ions, bombards the target and ejects atoms through momentum transfer; these atoms travel through the gas phase and condense on the substrate as a controlled film. Adjusting pressure, power, substrate temperature, and target composition influences film thickness, structure, adhesion, and properties. The method produces conductive, optical, protective, and wear-resistant coatings for electronics, sensors, energy devices, tools, and other engineered surfaces.

Sputter Deposition - Related Videos

Research

JoVE Journal - Chemistry

Niobium Oxide Films Deposited by Reactive Sputtering: Effect of Oxygen Flow Rate

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Cited by 8 •

2019

Here, we present a protocol for niobium oxide films deposition by reactive sputtering with different oxygen flow rates for use as an electron transport layer in perovskite solar cells.

Research

JoVE Journal - Engineering

Improving Thermoelectric Properties of Bi2Te3 Thin Films By Manganese Co-Sputtering

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2026

A radiofrequency co-sputtering protocol was developed to fabricate manganese-doped Bi2Te3 thin films and evaluate how manganese input influences structural and thermoelectric transport properties. Moderate manganese incorporation improved film uniformity and power-factor-related transport behavior, while higher manganese input increased structural disorder and resistivity.

Research

JoVE Journal - Engineering
Free Sample

Sputter Growth and Characterization of Metamagnetic B2-ordered FeRh Epilayers

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Cited by 21 •

2013

A method to prepare epitaxial layers of ordered alloys by sputtering is described. The B2-ordered FeRh compound is used as an example, as it displays a metamagnetic transition that depends sensitively on the degree of chemical order and the exact composition of the alloy.

Making Record-efficiency SnS Solar Cells by Thermal Evaporation and Atomic Layer Deposition

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Cited by 31 •

2015

Tin sulfide (SnS) is a candidate material for Earth-abundant, non-toxic solar cells. Here, we demonstrate the fabrication procedure of the SnS solar cells employing atomic layer deposition, which yields 4.36% certified power conversion efficiency, and thermal evaporation which yields 3.88%.

Education

JoVE Core - Chemistry

Phase Transitions: Sublimation and Deposition

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2020

Some solids can transition directly into the gaseous state, bypassing the liquid state, via a process known as sublimation. At room temperature and standard pressure, a piece of dry ice (solid CO2) sublimes, appearing to gradually disappear without ever forming any liquid. Snow and ice sublimate at temperatures below the melting point of water, a slow process that may be accelerated by winds and the reduced atmospheric pressures at high altitudes. When solid iodine is warmed, the solid sublimes...

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