Electrospray Deposition of Uniform Thickness Ge23Sb7S70 and As40S60 Chalcogenide Glass Films

Spencer Novak; Pao-Tai Lin; Cheng Li; Nikolay Borodinov; Zhaohong Han; Corentin Monmeyran; Neil Patel; Qingyang Du; Marcin Malinowski; Sasan Fathpour; Chatdanai Lumdee; Chi Xu; Pieter G. Kik; Weiwei Deng; Juejun Hu; Anuradha Agarwal; Igor Luzinov; Kathleen Richardson

doi:10.3791/54379

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Electrospray Deposition of Uniform Thickness Ge₂₃Sb₇S₇₀ and As₄₀S₆₀ Chalcogenide Glass Films

厚度均匀葛电沉积 23锑 7取值 70和As 40取值 60硫系玻璃薄膜

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08:38 min

August 19, 2016

DOI: 10.3791/54379-v

Spencer Novak¹, Pao-Tai Lin^2,3, Cheng Li⁴, Nikolay Borodinov¹, Zhaohong Han⁵, Corentin Monmeyran⁵, Neil Patel⁵, Qingyang Du⁵, Marcin Malinowski⁴, Sasan Fathpour⁴, Chatdanai Lumdee⁴, Chi Xu⁴, Pieter G. Kik⁴, Weiwei Deng⁶, Juejun Hu⁷, Anuradha Agarwal⁷, Igor Luzinov¹, Kathleen Richardson⁴

¹Department of Materials Science and Engineering,Clemson University, ²Department of Materials Science and Engineering,Texas A&M University, ³Department of Electrical and Computer Engineering,Texas A&M University, ⁴College of Optics and Photonics, Center for Research and Education in Optics and Lasers (CREOL),University of Central Florida, ⁵Department of Materials Science and Engineering,Massachusetts Institute of Technology, ⁶Department of Mechanical Engineering,Virginia Polytechnic Institute, ⁷Microphotonics Center,Massachusetts Institute of Technology

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展示了一种使用单喷嘴电喷雾的计算机数控运动的均匀厚度溶液衍生硫属化物玻璃膜沉积的方法。

本研究的总体目标是开发用于中红外光子应用的硫系化物玻璃的电喷雾薄膜沉积，并探索这种沉积方法的独特灵活性。该技术的主要优点是它允许材料局部沉积，并能够制造工程薄膜厚度轮廓。这样就可以创建空间变化的合成渐变。

由于这些优势，电喷雾可以通过允许更灵活的设备设计来推动基于芯片的中红外化学传感设备领域的发展。要设置沉积过程，首先将针头的末端放入硫属化物玻璃中。将注射泵以缓慢的速度（例如每小时 150 微升）设置为提取模式，以防止形成气泡，从而将溶液吸入注射器中。

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