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Journal / Engineering / 微波导光衰减法测量半导体中的载波寿命…
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Engineering

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微波导光衰减法测量半导体中的载波寿命
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微波导光衰减法测量半导体中的载波寿命

Article DOI: 10.3791/59007-v • 07:38 min • April 18th, 2019
April 18th, 2019 •
1, 1, 1,2
1Department of Electrical & Mechanical Engineering, Nagoya Institute of Technology, 2Frontier Research Institute for Material Science, Nagoya Institute of Technology

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作为半导体中重要的物理参数之一, 本文采用微波光导性衰减法的协议对载流子寿命进行了测量。

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工程 第146期 微波光导率衰减法 职业寿命 半导体材料 时间分辨测量 缺陷表征 表面重组
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