Quartz Vacuum Chuck

A quartz vacuum chuck is a precision workholding device that uses a vacuum to secure substrates or components during manufacturing, inspection, and processing. Vacuum ports or channels create reduced pressure beneath the workpiece, allowing atmospheric pressure to hold it against the chuck’s flat, chemically resistant quartz surface without mechanical clamps that could obstruct or damage the part. In engineering, quartz vacuum chucks support wafer handling, photolithography, coating, laser processing, and metrology, where low contamination, dimensional stability, and resistance to heat or aggressive chemicals are important. Their design can improve alignment, uniform contact, and process repeatability in demanding laboratory and industrial systems.

Quartz Vacuum Chuck - Related Videos

Research

JoVE EoE - Neurotherapeutics

Rodent Brain Microinjection Using a Quartz Microneedle

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2025

Source: Paolone, G., et al. Personalized Needles for Microinjections in the Rodent Brain. J. Vis. Exp. (2018).This video demonstrates a rodent brain microneedle injection using a quartz microneedle with holes. The microneedle is attached to a syringe and micropump to control the delivery rate. The needle with the injection solution is inserted into the brain with the delivery speed set at low. Once positioned, the delivery speed is increased. The needle is withdrawn after a brief pause.

Preparation of Macroporous Epitaxial Quartz Films on Silicon by Chemical Solution Deposition

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Cited by 7 •

2015

A protocol is presented for the preparation of piezoelectric macroporous epitaxial films of quartz on silicon by solution chemistry using dip-coating and thermal treatments in air.

Education

JoVE Science Education - Basic Biology

Proper Operation of Vacuum Based Equipment

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2023

Source: Robert M. Rioux, Ajay Sathe & Zhifeng Chen, Pennsylvania State University, University Park, PA Vacuum is required for a number of laboratory procedures. This is most routinely achieved in the laboratory by the use of vacuum pumps. In addition to working at low pressures, vacuum pumps can also be used to enable rapid changing of the atmospheres in a reactor or flask by evacuation and backfilling.

Seedless Growth of Bismuth Nanowire Array via Vacuum Thermal Evaporation

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Cited by 1 •

2015

A protocol for seedless and high yield growth of bismuth nanowire arrays through vacuum thermal evaporation technique is presented.

Dry Oxidation and Vacuum Annealing Treatments for Tuning the Wetting Properties of Carbon Nanotube Arrays

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Cited by 11 •

2013

This article describes a simple method to fabricate vertically aligned carbon nanotube arrays by CVD and to subsequently tune their wetting properties by exposing them to vacuum annealing or dry oxidation treatment.

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