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JoVE Journal Engineering

在透射电子显微镜原位时间相关的介质击穿：一种可能性，了解微电子器件的失效机理

Simultaneous Measurement of Turbulence and Particle Kinematics Using Flow Imaging Techniques

Journal (Engineering)

Simultaneous Measurement of Turbulence and Particle Kinematics Using Flow Imaging Techniques

Failure Analysis of Batteries Using Synchrotron-based Hard X-ray Microtomography

Journal (Engineering)

Failure Analysis of Batteries Using Synchrotron-based Hard X-ray Microtomography

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在透射电子显微镜原位时间相关的介质击穿：一种可能性，了解微电子器件的失效机理

Article DOI: 10.3791/52447-v • 09:26 min • June 26th, 2015

June 26th, 2015 •

Zhongquan Liao^1,2, Martin Gall¹, Kong Boon Yeap^1,3, Christoph Sander¹, André Clausner¹, Uwe Mühle¹, Jürgen Gluch¹, Yvonne Standke¹, Oliver Aubel⁴, Armand Beyer⁴, Meike Hauschildt⁴, Ehrenfried Zschech^1,2

¹Fraunhofer Institute for Ceramic Technologies and Systems, ²Dresden Center for Nanoanalysis, Technische Universität Dresden, ³Globalfoundries Fab 8, ⁴Globalfoundries Fab 1

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工程，第100，时间依赖介电击穿可靠性，铜互连，降解动力学，

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