Epitaxial Film Growth

Epitaxial film growth is the formation of a crystalline thin film whose atomic arrangement follows the crystallographic orientation of an underlying substrate, enabling precise control of material properties in engineering. During deposition, atoms or molecules reach a heated substrate, diffuse across its surface, and incorporate into an ordered lattice when temperature, pressure, material flux, and lattice matching support stable growth. Depending on these conditions, films can develop coherent interfaces, strain, defects, or distinct growth modes. This control is essential for manufacturing semiconductor devices, lasers, sensors, magnetic components, and other advanced technologies, while also supporting research into nanoscale materials and engineered interfaces.

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Research

JoVE Journal - Chemistry

Epitaxial Growth of Perovskite Strontium Titanate on Germanium via Atomic Layer Deposition

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Cited by 3 •

2016

This work details the procedures for the growth and characterization of crystalline SrTiO3 directly on germanium substrates by atomic layer deposition. The procedure illustrates the ability of an all-chemical growth method to integrate oxides monolithically onto semiconductors for metal-oxide semiconductor devices.

Research

JoVE Journal - Chemistry
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Atomically Defined Templates for Epitaxial Growth of Complex Oxide Thin Films

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Cited by 7 •

2014

Various procedures are outlined to prepare atomically defined templates for epitaxial growth of complex oxide thin films. Chemical treatments of single crystalline SrTiO3 (001) and DyScO3 (110) substrates were performed to obtain atomically smooth, single terminated surfaces. Ca2 Nb3 O10- nanosheets were used to create atomically defined templates on arbitrary substrates.

Preparation of Macroporous Epitaxial Quartz Films on Silicon by Chemical Solution Deposition

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Cited by 7 •

2015

A protocol is presented for the preparation of piezoelectric macroporous epitaxial films of quartz on silicon by solution chemistry using dip-coating and thermal treatments in air.

Plasma-Assisted Molecular Beam Epitaxy Growth of Mg3N2 and Zn3N2 Thin Films

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Cited by 1 •

2019

This article describes the growth of epitaxial films of Mg3N2 and Zn3N2 on MgO substrates by plasma-assisted molecular beam epitaxy with N2 gas as the nitrogen source and optical growth monitoring.

Epitaxial Nanostructured α-Quartz Films on Silicon: From the Material to New Devices

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Cited by 2 •

2020

This work presents a detailed protocol for the microfabrication of nanostructured α-quartz cantilever on a Silicon-On-Insulator(SOI) technology substrate starting from the epitaxial growth of quartz film with the dip coating method and then nanostructuration of the thin film via nanoimprint lithography.

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