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13:05 min
May 11, 2019
DOI:
10.3791/59415-v
This article describes the growth of epitaxial films of Mg3N2 and Zn3N2 on MgO substrates by plasma-assisted molecular beam epitaxy with N2 gas as the nitrogen source and optical growth monitoring.
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Wu, P., Tiedje, T. Plasma-Assisted Molecular Beam Epitaxy Growth of Mg3N2 and Zn3N2 Thin Films. J. Vis. Exp. (147), e59415, doi:10.3791/59415 (2019).
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