Journal
/
Engineering
/
Plasma-Assisted Molecular Beam Epitaxy Growth of Mg3N2 and Zn3N2 Thin Films
JoVE Journal
Engineering
Author Produced
A subscription to JoVE is required to view this content.  Sign in or start your free trial.
JoVE Journal Engineering
Plasma-Assisted Molecular Beam Epitaxy Growth of Mg3N2 and Zn3N2 Thin Films

Plasma-Assisted Molecular Beam Epitaxy Growth of Mg3N2 and Zn3N2 Thin Films

DOI:
10.3791/59415-v

•

13:05 min

•

May 11, 2019

•

,
1Department of Electrical and Computer Engineering,University of Victoria

Chapters

  • 00:00Title
  • 00:57MgO Substrate Preparation
  • 01:50Operation of VG V80 MBE
  • 02:13Substrate Loading
  • 04:04Metal Flux Measurements
  • 05:59Nitrogen Plasma
  • 06:51In-situ Laser Light Scattering
  • 08:35Growth Rate Determination
  • 09:13Results
  • 10:46Conclusion

Summary

Automatic Translation

Automatic Translation

This article describes the growth of epitaxial films of Mg3N2 and Zn3N2 on MgO substrates by plasma-assisted molecular beam epitaxy with N2 gas as the nitrogen source and optical growth monitoring.

Tags

Keywords: Plasma-assisted Molecular Beam EpitaxyMg3N2Zn3N2II-V Compound SemiconductorsAnti-bixbyite Crystal StructureMBE GrowthMgO SubstrateHigh-temperature AnnealingRHEEDQuartz Crystal MicrobalanceSample DegassingSample Transfer

Article

Embed

ADD TO PLAYLIST

Usage Statistics

Related Videos

check_url/59415?article_type=v

Molecular Beam Mass Spectrometry With Tunable Vacuum Ultraviolet (VUV) Synchrotron Radiation
check_url/59415?article_type=v

Speciation and Bioavailability Measurements of Environmental Plutonium Using Diffusion in Thin Films
check_url/59415?article_type=v

Plasma-assisted Molecular Beam Epitaxy of N-polar InAlN-barrier High-electron-mobility Transistors
check_url/59415?article_type=v

In Situ Monitoring of the Accelerated Performance Degradation of Solar Cells and Modules: A Case Study for Cu(In,Ga)Se2 Solar Cells
check_url/59415?article_type=v

Focused Ion Beam Fabrication of LiPON-based Solid-state Lithium-ion Nanobatteries for In Situ Testing
check_url/59415?article_type=v

Fabrication of Ultra-thin Color Films with Highly Absorbing Media Using Oblique Angle Deposition
check_url/59415?article_type=v

Film Control to Study Contributions of Waves to Droplet Impact Dynamics on Thin Flowing Liquid Films
check_url/59415?article_type=v

Fabrication of Schottky Diodes on Zn-polar BeMgZnO/ZnO Heterostructure Grown by Plasma-assisted Molecular Beam Epitaxy
check_url/59415?article_type=v

Demonstration of Equal-Intensity Beam Generation by Dielectric Metasurfaces
check_url/59415?article_type=v

Procedure for the Transfer of Polymer Films Onto Porous Substrates with Minimized Defects

Read Article