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Epitaxial Nanostructured α-Quartz Films on Silicon

Epitaxial Nanostructured α-Quartz Films on Silicon: From the Material to New Devices

Article DOI: 10.3791/61766-v
October 6th, 2020


Summary October 6th, 2020

This work presents a detailed protocol for the microfabrication of nanostructured α-quartz cantilever on a Silicon-On-Insulator(SOI) technology substrate starting from the epitaxial growth of quartz film with the dip coating method and then nanostructuration of the thin film via nanoimprint lithography.


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