Photolithography Assisted

Photolithography-assisted fabrication is an engineering approach that uses patterned light to define microscale features on a material, enabling precise control over device geometry and surface structure. In a typical process, a light-sensitive photoresist coats a substrate, a photomask selectively exposes the resist to ultraviolet light, and development removes either the exposed or unexposed regions; subsequent etching or deposition transfers the pattern into the underlying material. This technique supports semiconductor manufacturing, microelectromechanical systems, microfluidic devices, sensors, and other microscale technologies, where repeatable patterning and high dimensional accuracy are essential.

Photolithography Assisted - Related Videos

Education

JoVE Science Education - Engineering

Microfabrication via Photolithography

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2023

The fabrication of BioMEM devices is often done using a microfabrication technique called photolithography. This widely used method utilizes light to transfer a pattern onto a silicon wafer, and provides the basis for the fabrication of many types of BioMEM devices. This video presents the photolithography technique, shows how the process is performed in the cleanroom, and introduces some applications of the process.

Research

JoVE Journal - Bioengineering

Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices

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Cited by 26 •

2017

Multilayer microfluidic devices often involve the fabrication of master molds with complex geometries for functionality. This article presents a complete protocol for multi-step photolithography with valves and variable height features tunable to any application. As a demonstration, we fabricate a microfluidic droplet generator capable of producing hydrogel beads.

Polymeric Microneedle Array Fabrication by Photolithography

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Cited by 24 •

2015

Here, we present a protocol describing a mold-free fabrication process of the polymeric microneedles by photolithography.

Research

JoVE Journal - Bioengineering
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Fabrication of Micropatterned Hydrogels for Neural Culture Systems using Dynamic Mask Projection Photolithography

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Cited by 46 •

2011

Simple techniques are described for the rapid production of microfabricated neural culture systems using a digital micromirror device for dynamic mask projection lithography on regular cell culture substrates. These culture systems may be more representative of natural biological architecture, and the techniques described could be adapted for numerous applications.

Research

JoVE Journal - Medicine
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Robot-assisted Partial Splenectomy

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2026

This protocol describes a robot-assisted partial splenectomy for a benign splenic tumor. The robotic approach optimizes spleen preservation by enhancing surgical precision, minimizing blood loss, and improving postoperative outcomes. Key surgical steps include meticulous splenic hilum dissection, selective vascular ligation, intraoperative ultrasonography, and controlled parenchymal transection.

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