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Real-Time DC-dynamisk Biasing metoden for veksling Tid Bedring i Alvorlig Underdamped Fringing-feltet Elektro MEMS Aktuatorer

Article DOI: 10.3791/51251-v • 11:44 min • August 15th, 2014
August 15th, 2014 •
1, 2, 3, 1, 3
1Department of Electrical and Computer Engineering, University of California, Davis, 2Digital Light Projection (DLP) Technology Development, Texas Instruments, 3Birck Nanotechnology Center and the Department of Electrical and Computer Engineering, Purdue University

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Den robuste enhet utforming av fringing-feltelektro MEMS aktuatorer resultater i iboende lave klemme-film demping forhold og lang settling ganger når du utfører bytte operasjoner ved hjelp av konvensjonelle skritt vekting. Sanntids skiftetid forbedring med DC-dynamiske kurver reduserer innsovningstid av fringing-feltet MEMS aktuatorer når overgangen mellom up-to-ned og down-to-up stater.

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Fysikk mikroelektromekaniske systemer aktuatorer bytte tid innsovningstid elektrostatiske enheter mikromaskinering tynn film enheter
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