Author Spotlight: Advancements in High-Performance Thermoelectric Thin Films Through Radio Frequency Magnetron Sputtering

Nurfarhana Ahmad Musri; Yoganash Putthisigamany; Puvaneswaran Chelvanathan; Norasikin Ahmad Ludin; Nadhrah Md Yatim; Ubaidah Syafiq

doi:10.3791/66248

Deposition of Bi₂Te₃ and Sb₂Te₃ Thin Films on Glass Substrates via RF Sputtering

May 17th, 2024

Author Spotlight: Advancements in High-Performance Thermoelectric Thin Films Through Radio Frequency Magnetron Sputtering

00:45 min

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Radio Frequency Magnetron Sputtering of Bi<sub>2</sub>Te<sub>3</sub> and Sb<sub>2</sub>Te<sub>3</sub> Thermoelectric Thin Films on Glass Substrates

Radio Frequency Magnetron Sputtering of Bi₂Te₃ and Sb₂Te₃ Thermoelectric Thin Films on Glass Substrates

03:39 min

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Nurfarhana Ahmad Musri¹, Yoganash Putthisigamany¹, Puvaneswaran Chelvanathan¹, Norasikin Ahmad Ludin¹, Nadhrah Md Yatim², Ubaidah Syafiq¹

¹Solar Energy Research Institute (SERI), Universiti Kebangsaan Malaysia, ²Faculty of Science and Technology, Universiti Sains Islam Malaysia

Summary
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The manuscript describes a protocol for radio frequency magnetron sputtering of Bi₂Te₃ and Sb₂Te₃ thermoelectric thin films on glass substrates, which represents a reliable deposition method that provides a wide range of applications with the potential for further development.

Article

Deposition of Bi2Te3 and Sb2Te3 Thin Films on Glass Substrates via RF Sputtering

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Deposition of Bi₂Te₃ and Sb₂Te₃ Thin Films on Glass Substrates via RF Sputtering