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A Fabrication and Measurement Method for a Flexible Ferroelectric Element Based on Van Der Waals Heteroepitaxy

Article DOI: 10.3791/57221-v • 10:40 min • April 8th, 2018
April 8th, 2018 •
*1, *2, 1, 1, 3
1Key Laboratory of Low Dimensional Materials and Application Technology of Ministry of Education, Xiangtan University, 2Department of Physics, Indian Institute of Science, 3Department of Materials Science and Engineering, National Chiao Tung University
* These authors contributed equally

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In this paper, we present a protocol to directly grow an epitaxial yet flexible lead zirconium titanate memory element on muscovite mica.

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Fabrication Method Measurement Method Flexible Ferroelectric Element Van Der Waals Heteroepitaxy PZT Thin Films Mica Substrate Double-sided Tape Tweezers Silver Paint Hot Plate PLD Chamber Repetition Rate Laser Energy Focusing Lens CFO Thin Film SRO Bottom Electrode PZT Thin Film
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