Lithographic Patterning

Lithographic patterning is a fabrication method that transfers designed, microscale or nanoscale features onto a substrate, making it central to engineering devices and structured materials. In a typical process, a resist-coated surface is exposed through a mask or by a focused beam, then developed so selected regions are removed or retained; subsequent etching, deposition, or lift-off transfers the pattern into the underlying material. Engineers use lithographic patterning to manufacture integrated circuits, sensors, microfluidic systems, and photonic components, while controlling resolution, alignment, feature size, and material compatibility to improve device performance and enable miniaturization.

Lithographic Patterning - Related Videos

Research

JoVE Journal - Bioengineering
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Soft Lithographic Functionalization and Patterning Oxide-free Silicon and Germanium

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Cited by 3 •

2011

Here we describe a simple method for patterning oxide-free silicon and germanium with reactive organic monolayers and demonstrate functionalization of the patterned substrates with small molecules and proteins. The approach completely protects surfaces from chemical oxidation, provides precise control over feature morphology, and provides ready access to chemically discriminated patterns.

Research

JoVE Journal - Engineering

Patterning via Optical Saturable Transitions - Fabrication and Characterization

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Cited by 1 •

2014

We report that the diffraction limit of conventional optical lithography can be overcome by exploiting the transitions of organic photochromic derivatives induced by their photoisomerization at low light intensities.1-3 This paper outlines our fabrication technique and two locking mechanisms, namely: dissolution of one photoisomer and electrochemical oxidation.

Microfabrication of Nanoporous Gold Patterns for Cell-material Interaction Studies

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Cited by 16 •

2013

We report on techniques to micropattern nanoporous gold thin films via stencil printing and photolithography, as well as methods to culture cells on the microfabricated patterns. In addition, we describe image analysis methods to characterize morphology of the material and the cultured cells using scanning electron and fluorescence microscopy techniques.

Creating Two-Dimensional Patterned Substrates for Protein and Cell Confinement

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Cited by 5 •

2011

Self-assembled monolayers (SAMs) formed from long chain alkane thiols on gold provide well-defined substrates for the formation of protein patterns and cell confinement. Microcontact printing of hexadecanethiol using a polydimethylsiloxane (PDMS) stamp followed by backfilling with a glycol-terminated alkane thiol monomer produces a pattern where protein and cells adsorb only to the stamped hexadecanethiol region.

Soft Lithographic Procedure for Producing Plastic Microfluidic Devices with View-ports Transparent to Visible and Infrared Light

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Cited by 1 •

2017

A protocol for the fabrication of plastic microfluidic devices with transparent view-ports for visible and infrared light imaging is described.

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