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Epitaxial nanostrukturerad α-kvartsfilmer på kisel: Från materialet till nya enheter

Article DOI: 10.3791/61766-v • 11:34 min • October 6th, 2020
October 6th, 2020 •
1, 1, 1, 1, 1
1Institut d'Electronique et des Systemes (IES), CNRS, Université de Montpellier

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Detta arbete presenterar ett detaljerat protokoll för mikrotillverkning av nanostrukturerad α-kvarts cantilever på en Silicon-On-Insulator (SOI) teknik substrat från epitaxial tillväxt av kvartsfilm med dip beläggning metod och sedan nanostructuration av tunnfilmen via nanoimprint litografi.

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Teknik nummer 164 nanoimprint litografi (NIL) nanostrukturerad α-kvarts SOI-substrat piezoelektrisk mikrotillverkning litografi etsning cantilever MEMS
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