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Kompakt Lens-mindre Digital Holografisk Microscope for MEMS Inspektion og karakterisering
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Kompakt Lens-mindre Digital Holografisk Microscope for MEMS Inspektion og karakterisering

Article DOI: 10.3791/53630-v • 10:28 min • July 5th, 2016
July 5th, 2016 •
1, 1, 1, 2, 1,2
1School of Mechanical and Aerospace Engineering, Center of Laser and Optical Engineering, Nanyang Technological University, 2d'Optron Pte Ltd

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Vi præsenterer et kompakt refleksion digitalt holografisk systemet (CDHM) for inspektion og karakterisering af MEMS-enheder. En linse-mindre design ved hjælp af en divergerende input bølge giver naturlig geometrisk forstørrelse demonstreres. Både statiske og dynamiske studier præsenteres.

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Engineering Digital holografi billedbehandlingssystem kvantitativ fase måling mikroskopi ikke-destruktiv prøvning MEMS
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