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Fabrication and Characterization of Superconducting Resonators

Article DOI: 10.3791/53868-v • 10:26 min • May 21st, 2016
May 21st, 2016 •
1, 2, 2, 1, 2, 1
1Astrophysics Science Division, NASA Goddard Space Flight Center, 2Instrument Systems and Technology Division, NASA Goddard Space Flight Center

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Superconducting microwave resonators are of interest for detection of light, quantum computing applications and materials characterization. This work presents a detailed procedure for fabrication and characterization of superconducting microwave resonator scattering parameters.

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Fabrication Characterization Superconducting Resonators Scattering Parameters Superconductors Instrumentation Catheterization Electric Substrate Internal Quality Factors Loss Fractions Silicon Substrate Precise Measurements Kinetic Inductance Detectors Astrophysical Signals Quantum Computing Applications Materials Characterization Silicon On Insulator Wafer Spin Coat Photo-resist Layer Electron-beam Deposit Germanium Thin Depositive Photo Resist Mask Aligner Develop Resist TMAH-based Solution Reactive Ion Etch Sulpher Hexafluoride Plasma Oxygen Plasma
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