Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices

Kara Brower; Adam K. White; Polly M. Fordyce

doi:10.3791/55276

Journal

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生物工程

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多级可变高度的光刻多层带瓣微流体装置

Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices

JoVE 杂志
生物工程

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JoVE 杂志生物工程

Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices

多级可变高度的光刻多层带瓣微流体装置

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14,275 Views

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10:18 min

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January 27, 2017

DOI:

10.3791/55276-v

DOI:

10.3791/55276-v

•

10:18 min

January 27, 2017

•

2 Views

Kara Brower*^1,2,4, Adam K. White*^1,2, Polly M. Fordyce^1,2,3,4

¹Department of Bioengineering,Stanford University, ²Microfluidic Foundry,Stanford University, ³Department of Genetics,Stanford University, ⁴Chem-H Institute,Stanford University

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Summary

Multilayer microfluidic devices often involve the fabrication of master molds with complex geometries for functionality. This article presents a complete protocol for multi-step photolithography with valves and variable height features tunable to any application. As a demonstration, we fabricate a microfluidic droplet generator capable of producing hydrogel beads.