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Fabricage van Surface Acoustic Wave-apparaten op lithium niobate

Article DOI: 10.3791/61013-v • 07:55 min • June 18th, 2020
June 18th, 2020 •
1, 1, 1
1Medically Advanced Devices Laboratory, Center for Medical Devices and Instrumentation, Department of Mechanical and Aerospace Engineering, Jacobs School of Engineering and Department of Surgery, School of Medicine, University of California San Diego

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Twee fabricagetechnieken, lift-off en natte etsen, worden beschreven in de productie van interdigitale elektrodetransducers op een piëzo-elektrisch substraat, lithium niobate, op grote schaal gebruikt om oppervlakte akoestische golven te genereren nu vinden breed nut in micro-tot nanoschaal vloeistof. De geproduceerde elektroden worden getoond om megahertz te veroorzaken om Rayleigh oppervlakte akoestische golven te bestellen.

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Engineering acoustofluidics oppervlakte akoestische golven lithium niobate interdigitale transducers lift-off natte etsen
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