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紧凑的镜头少数字全息显微镜的MEMS检测与表征
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紧凑的镜头少数字全息显微镜的MEMS检测与表征

Article DOI: 10.3791/53630-v • 10:28 min • July 5th, 2016
July 5th, 2016 •
1, 1, 1, 2, 1,2
1School of Mechanical and Aerospace Engineering, Center of Laser and Optical Engineering, Nanyang Technological University, 2d'Optron Pte Ltd

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我们提出了一个小巧的反射全息数字化系统（CDHM）MEMS器件的检测和鉴定。论证采用发散输入波提供自然几何放大倍率的镜头，无设计。静态和动态的研究介绍。

Tags

工程，第113，数字全息，成像系统，定量的相位测量，显微镜，无损检测，MEMS
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