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Kompakt Lens mindre Digital Holographic Mikroskop för MEMS inspektion och karakterisering
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Kompakt Lens mindre Digital Holographic Mikroskop för MEMS inspektion och karakterisering

Article DOI: 10.3791/53630-v • 10:28 min • July 5th, 2016
July 5th, 2016 •
1, 1, 1, 2, 1,2
1School of Mechanical and Aerospace Engineering, Center of Laser and Optical Engineering, Nanyang Technological University, 2d'Optron Pte Ltd

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Vi presenterar en kompakt reflektion digitala holografiska systemet (CDHM) för inspektion och karakterisering av MEMS-enheter. En lins-mindre design med en divergerande ingång våg ger naturlig geometrisk förstoring visas. Både statiska och dynamiska studier presenteras.

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Engineering Digital holografi bildsystem kvantitativ mätning fas mikroskopi oförstörande provning MEMS
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