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Fabrication of Micro-Patterned Chip with Controlled Thickness for High-Throughput Cryogenic Electron Microscopy

Article DOI: 10.3791/63739-v • 07:20 min • April 21st, 2022
April 21st, 2022 •
1,2, 3,4, 3,4, 3,4,5,6
1Department of Biomedical-Chemical Engineering, The Catholic University of Korea, 2Department of Biotechnology, The Catholic University of Korea, 3School of Chemical and Biological Engineering, and Institute of Chemical Processes, Seoul National University, 4Center for Nanoparticle Research, Institute of Basic Science (IBS), 5Institute of Engineering Research, College of Engineering, Seoul National University, 6Advanced Institutes of Convergence Technology, Seoul National University

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A newly developed micro-patterned chip with graphene oxide windows is fabricated by applying microelectromechanical system techniques, enabling efficient and high-throughput cryogenic electron microscopy imaging of various biomolecules and nanomaterials.

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Fabrication Micro-patterned Chip Controlled Thickness High-throughput Cryogenic Electron Microscopy Nano Scale Proteins Nano Materials Cryo EM MEMS Fabrication Technique Mass Production Micro Pattern Wells Experimental Purposes Efficiency 3D Structure Analysis Biomolecules Commercial Drug Discovery Thin Wafers Microchips Silicon Nitride Membranes Bending Wafer Silicon Nitrate Window Photo Resist (PR) Hexamethyldisilazane Solution Spin Coating Hot Plate Hydrophobic Surface Positive PR Ultraviolet Light Exposure
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