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Journal / Chemistry / Aerosol-asistida por deposición de Vapor químico…
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Aerosol-asistida por deposición de Vapor químico del óxido de Metal estructuras: barras de óxido de Zinc

Article DOI: 10.3791/56127-v • 06:39 min • September 14th, 2017
September 14th, 2017 •
1,2, 3, 4, 1, 1
1Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), 2SIX Research Centre, Brno University of Technology, 3Institute of Physics of Material, Academy of Science of Czech Republic, 4Institute of Physical Engineering and Central European Institute of Technology, Brno University of Technology

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Estructuras cilíndricas de óxido de zinc en forma de varillas se sintetizan mediante deposición de vapor químico asistida por aerosol sin el uso de partículas de catalizador-semilla previamente depositadas. Este método es escalable y compatible con varios sustratos basados en silicio, cuarzo o polímeros.

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Química número 127 óxido de Zinc estructuras columnares barras AACVD crecimiento no catalizado mecanismo de vapor de sólidos
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