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Graphene-Assisted Quasi-van der Waals Epitaxy af AlN Film på Nano-mønstrede Sapphire Substrat for Ultraviolet Light Emitting Diodes

Article DOI: 10.3791/60167-v • 07:00 min • June 25th, 2020
June 25th, 2020 •
*1,2, *3, 1,2, 1,2, 2,4, 1,2, 5, 1,2
1State Key Laboratory of Solid-State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Science, 3Center for Nanochemistry (CNC), Beijing National Laboratory for Molecular Science, College of Chemistry and Molecular Engineering, Peking University, 4State Key Laboratory of Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, 5Electron Microscopy Laboratory, School of Physics, Peking University
* These authors contributed equally

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En protokol for grafen-assisteret vækst af aln-film af høj kvalitet på nanomønstret safirunderlag præsenteres.

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Engineering graphene MOCVD AlN ultraviolet lysdioder van der Waals epitaxy nano-mønstrede safir substrat
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