Reconstrucción 3D del perfil de profundidad de las impurezas segregadas mediante espectrometría de masas de iones secundarios
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April 29, 2020
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El método presentado describe cómo identificar y resolver artefactos de medición relacionados con la espectrometría de masas de iones secundarios, así como obtener distribuciones 3D realistas de impurezas/dopantes en materiales de estado sólido.
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Michałowski, P. P., Zlotnik, S., Jóźwik, I., Chamryga, A., Rudziński, M. 3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry. J. Vis. Exp. (158), e61065, doi:10.3791/61065 (2020).
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