$$\rightleftharpoonup{xx}$$
$$\longleftharp{xx}$$,
$$\longrightharp{xx}$$,
The increasing market for small and portable ultrasound (US) scanners is leading to the development of new echographic probes in which part of the signal-conditioning and beamforming electronics is integrated into the probe handle, especially for 3D/4D imaging1. Emerging technologies particularly suited to achieve this high level of integration include Micromachined Ultrasonic Transducers (MUTs)2, a class of Micro Electro-Mechanical System (MEMS) transducers fabricated on silicon. In particular, Capacitive MUTs (CMUTs) have finally reached a technological maturity that makes them a valid alternative to piezoelectric transducers for next generation ultrasound imaging systems3. CMUTs are very appealing due to their compatibility with microelectronics technologies, wide bandwidth - which yields a higher image resolution - high thermal efficiency and, above all, high sensitivity4. In the context of the ENIAC JU project DeNeCoR (Devices for NeuroControl and NeuroRehabilitation)5, CMUT probes are being developed6 for US brain imaging applications (e.g. neurosurgery), where high-quality 2D/3D/4D images and accurate representation of brain structures are required.
In the development process of new US probes, the possibility of performing early assessments of imaging performance is fundamental. Typical assessment techniques involve measuring specific parameters like resolution and contrast, based on images of tissue-mimicking phantoms with embedded targets of known geometry and echogenicity. More realistic analysis with application-specific imaging targets can be extremely valuable for an early assessment of the expected performance of US probes in their potential application to a specific clinical field. On the other hand, the complete repeatability of acquisitions is fundamental for comparative testing of different configurations over time, and this requirement rules out in vivo experiments altogether.
Several works in the literature on diagnostic imaging techniques proposed the use of ex vivo animal specimens7, cadaver brains8, or tissue mimicking phantoms9 for different purposes10, which include the testing of imaging methods, registration algorithms, Magnetic Resonance (MR) sequences, or the US beam-pattern and resulting image quality. For example, in the context of brain imaging, Lazebnik et al.7 used a formalin-fixed sheep brain to evaluate a new 3D MR registration method; similarly, Choe et al.11 investigated a procedure for the registration of MR and light microscopy images of a fixed owl monkey brain. A polyvinyl alcohol (PVA) brain phantom was developed in9 and used to perform multimodal image acquisitions (i.e. MR, US, and Computed Tomography) to generate a shared image dataset12 for the testing of registration and imaging algorithms.
Overall, these studies confirm that the use of a realistic target for image acquisitions is indeed an essential step during the development of a new imaging technique. This represents an even more critical stage when designing a new imaging device, like the CMUT US probe presented in this paper, which is still in a prototyping phase and needs extensive and reproducible testing over time, for an accurate tuning of all design parameters before its final realization and possible validation in in vivo applications (as in13,14,15).
The experimental protocol described in this work has been thus designed to provide a robust, application-specific imaging assessment procedure for newly-developed US probes based on CMUT technology. To ensure both realism and repeatability, bovine brains (obtained through the standard food-supply commercial chain) fixed in formalin were chosen as imaging targets. The fixation procedure guarantees long-term preservation of tissue characteristics while retaining satisfactory morphological qualities and visibility properties in both US and MR imaging16,17.
The protocol for the assessment of US image quality described here also implements a feature borrowed from neuronavigation techniques used for neurosurgery15. In such approaches, US probes are connected to a motion tracking system that provides spatial position and orientation data in real-time. In this way, US images acquired during surgical activities can be automatically registered and visualized, for guidance, in superposition to pre-operatory MR images of the patient's brain. For the purposes of the presented protocol, the superposition with MR images (which are considered as the gold standard in brain imaging) is of great value, since it allows human experts to visually assess which morphological and tissue features are recognizable in the US images and, vice versa, to recognize the presence of imaging artifacts.
The possibility to compare images acquired with different US probes becomes even more interesting. The experimental protocol presented includes the possibility to define a set of spatial reference poses for US acquisitions, focused on the most feature-rich volume regions identified in a preliminary visual inspection of MR images. An integrated visual tool, developed for the Paraview open source software system18, provides guidance to operators for matching such predefined poses during US image acquisition phases. For the calibration procedures required by the protocol, it is fundamental to equip all target specimens - either biological or synthetic - with predefined position landmarks that provide unambiguous spatial references. Such landmarks must be visible in both US and MR images and physically accessible to measurements made with the motion tracking system. The chosen landmark elements for the experiment are small spheres of Flint glass, whose visibility in both US and MR images was demonstrated in the literature19 and confirmed by preliminary US and MR scans performed before the presented experiments.
The protocol presented relies on the Ultrasound Advanced Open Platform (ULA-OP)20, a complete and open research and development system for US image acquisition, which offers much wider experimental possibilities than commercially available scanners and serves as a common basis for the evaluation of different US probes.
First, the instruments used in this work are described, with particular reference to the newly designed CMUT probe. The experimental protocol is introduced in detail, with a thorough description of all the procedures involved, from initial design to system calibration, to image acquisition and post-processing. Finally, the obtained images are presented and the results are discussed, together with hints to future developments of this work.
Instrumentation
CMUT probe prototype
The experiments were carried out using a newly developed 256-element CMUT linear array prototype, designed, fabricated, and packed at the Acoustoelectronics Laboratory (ACULAB) of Roma Tre University (Rome, Italy), using the CMUT Reverse Fabrication Process (RFP)4. RFP is a microfabrication and packaging technology, specifically conceived for the realization of MEMS transducers for US imaging applications, whereby the CMUT microstructure is fabricated on silicon following an "upside-down" approach21. As compared to other CMUT fabrication technologies, RFP yields to improved imaging performance due to the high uniformity of the CMUT cells' geometry over the entire array, and to the use of acoustically engineered materials in the probe head package. An important feature of RFP is that the electrical interconnection pads are located on the rear part of the CMUT die, which eases the 3D-integration of 2D arrays and front-end multi-channel electronics.
The 256-element CMUT array was designed to operate in a frequency band centered at 7.5 MHz. An element pitch of 200 µm was chosen for the array resulting in a maximum field-of-view width of 51.2 mm. The height of the single CMUT array elements was defined to achieve suitable performance in terms of lateral resolution and penetration capability. A 5 mm array element height was chosen in order to obtain a -3 dB beam width of 0.1 mm and a -3 dB depth of focus of 1.8 mm at 7.5 MHz, when fixing the elevation focus at a depth of 18 mm by means of an acoustic lens. 195 µm-wide array elements were obtained by arranging and electrically connecting in parallel 344 circular CMUT cells, following a hexagonal layout. Consequently, the resulting 5 µm element-to-element distance, i.e. the kerf, matches the membrane-to-membrane separation. A schematic representation of the structure of a CMUT array is reported in Figure 1.

Figure 1: CMUT array structure. Schematic representation of the structure of a CMUT array: array elements composed of several cells connected in parallel (a), layout of the CMUT microstructure (b); cross-section of a CMUT cell (c). Please click here to view a larger version of this figure.
The CMUT microfabrication parameters, i.e. the lateral and vertical dimensions of the plate and electrodes, were defined using Finite Element Modeling (FEM) simulations with the aim of achieving a broadband immersion operation, characterized by a frequency response centered at 7.5 MHz and a 100% -6 dB two-way fractional bandwidth. The height of the cavity, i.e. the gap, was defined to achieve a collapse voltage of 260 V to maximize the two-way sensitivity, by biasing the CMUT at 70% of the collapse voltage4, considering an 80 V maximum excitation signal voltage. Table 1 summarizes the main geometrical parameters of the microfabricated CMUT.
| CMUT Array Design Parameters |
| Parameter | Value |
| Array | |
| Number of elements | 256 |
| Element pitch | 200 µm |
| Element length (elevation) | 5 mm |
| Fixed elevation focus | 15 mm |
| CMUT Microstructure | |
| Cell diameter | 50 µm |
| Electrode diameter | 34 µm |
| Cell-to-cell lateral distance | 7.5 µm |
| Plate thickness | 2.5 µm |
| Gap height | 0.25 µm |
Table 1. CMUT probe parameters. Geometrical parameters of the CMUT linear-array probe and CMUT cell microstructure.
The packaging process used to integrate the CMUT array in a probe head is described in reference4. The acoustic lens was fabricated using a room temperature vulcanized (RTV) silicone rubber doped with metal-oxide nanopowders to match the acoustic impedance of water and avoid spurious reflections at the interface22. The resulting compound was characterized by a density of 1280 kg/m3 and a speed of sound of 1100 m/s. A 7 mm curvature radius was chosen for the cylindrical lens, leading to a geometrical focus of 18 mm and a maximum thickness of approximately 0.5 mm above the transducer surface. A picture of the CMUT probe head is shown in Figure 2(a).

Figure 2: CMUT probe. Head of the developed CMUT probe, including the linear array of transducers and acoustic lens (a), and the full CMUT probe with connector (b). Please click here to view a larger version of this figure.
The CMUT probe head was coupled to the probe handle containing multichannel reception analog front-end electronics and a multipolar cable for the connection to the US scanner. The single channel electronic circuit is a high input-impedance 9 dB-gain voltage amplifier that provides electrical current necessary to drive the cable impedance. The multichannel electronics, described in reference 4, is based on a circuit topology including an ultra-low-power low-noise receiver and an integrated switch for the transmit/receive signal duplexing. The front-end electronics power supply and the CMUT bias voltage are generated by a custom power supply unit and fed to the probe through the multipolar cable. The complete probe is shown in Figure 2(b).
Piezoelectric US probes
For qualitative comparison of the images obtained with the CMUT probe above, two commercially-available piezoelectric US probes were included in the experiments. The first one is a linear-array probe with 192 transducing elements, a 245 µm pitch, and a 110% fractional bandwidth centered at 8 MHz. This probe was used to acquire 2D B-mode images. The second probe is a probe for 3D imaging with a mechanically swept linear array of 180 transducing elements, with a 245 µm pitch and a 100% fractional bandwidth centered at 8.5 MHz. A stepper motor placed inside the probe housing enables sweeping the linear array to acquire multiple planes, which can be used to reconstruct a 3D image of the scanned volume23.
ULA-OP System
The acquisition of US images was carried out by employing the ULA-OP system20, which is a complete and open US research and development system, designed and realized at the Microelectronics Systems Design Laboratory of the University of Florence, Italy. The ULA-OP system can control, both in transmission (TX) and reception (RX), up to 64 independent channels connected through a switch matrix to an US probe with up to 192 piezoelectric or CMUT transducers. The system architecture features two main processing boards, an Analog Board (AB) and a Digital Board (DB), both contained in a rack, which are completed by a power-supply board and a back-plane board that contains the probe connector and all internal routing components. The AB contains the front-end to the probe transducers, in particular the electronic components for analog conditioning of the 64 channels and the programmable switch matrix that maps dynamically the TX-RX channels to the transducers. The DB is in charge of real-time beamforming, synthesizing the TX signals and processing the RX echoes to produce the desired output (for instance B-mode images or Doppler sonograms). It is worth highlighting that the ULA-OP system is fully configurable, hence the signal in TX can be any arbitrary waveform within the system bandwidth (e.g. three-level pulses, sine-bursts, chirps, Huffman codes, etc.) with a maximum amplitude of 180 Vpp; in addition, the beamforming strategy can be programmed according to the latest focusing patterns (e.g. focused wave, multi-line-transmission, plane wave, diverging waves, limited diffraction beams, etc.)24,25. At the hardware level, these tasks are shared among five Field Programmable Gate Arrays (FPGAs) and one Digital Signal Processor (DSP). With mechanically-swept 3D imaging probes, such as the one described above, the ULA-OP system also controls the stepper motor inside the probe, for the synchronized acquisition of individual 2D frames at each position of the transducer array.
The ULA-OP system can be re-configured at run time and adapted to different US probes. It communicates through a USB 2.0 channel with a host computer, equipped with a specific software tool. The latter has a configurable graphical interface that provides real-time visualization of US images, reconstructed in various modes; with volumetric probes, for instance, two B-mode images of perpendicular planes in the scanned volume can be displayed in real-time.
The main advantage of the ULA-OP system for the purposes of the described protocol is that it allows an easy tuning of the TX-RX parameters and it offers full access to the signal data collected at each step in the processing chain26, also making it possible to test new imaging modalities and beamforming techniques27,28,29,30,31,32,33.
Motion tracking system
To record the US probe position during image acquisition, an optical motion tracking system was employed34. The system is based on a sensor unit that emits infrared light via two illuminators (light emitting diodes (LEDs)) and uses two receivers (i.e. a lens and a charge-coupled device (CCD)) to detect the light reflected by multiple purpose-specific passive markers arranged in predefined rigid shapes. Information about reflected light is then processed by an on-board CPU to compute both position and orientation data, which can be transferred to a host computer connected via USB 2.0. The same link can be used to control the configuration of the sensor unit.
The sensor unit ships together with a set of tools, each endowed with four reflective markers arranged in a rigid geometrical configuration. The motion tracking system can track up to six distinct rigid tools simultaneously, at a working frequency of approximately 20 Hz. Two such tools were used for these experiments: a pointer tool, that allows acquiring the 3D position touched by its tip, and a clamp-equipped tool, that can be attached to the US probe under test (see Figure 14).
On the software side, the motion tracker features a low-level serial application programming interface (API) for both unit control and data acquisition, that can be accessed via USB. By default, position and orientations are returned as multi-entry items, i.e. one entry per each tool being tracked. Each entry contains a 3D position (x, y, z) expressed in mm and an orientation (q0, qx, qy, qz) expressed as a quaternion. The system also comes with a toolbox of higher-level software instruments, which includes a graphical tracking tool for visualizing and measuring in real-time the positions/orientations of multiple tools within the field of view of the sensor unit.
System overview, integration, and software components
The diagram in Figure 3 summarizes the instrumentation adopted for the protocol, also describing the data stream that flows across the systems.

Figure 3: Block diagram of the whole hardware setup and system integration. The US probe is connected to the ULA-OP system which communicates via USB with the notebook for US image acquisition. At the same time, the notebook is also connected via USB to the motion tracking system, for position data acquisition, and via Ethernet to the workstation, for data processing. Please click here to view a larger version of this figure.
Apart from the US probes, the motion tracker, and the ULA-OP system, which have been described above, the setup also includes two computers, namely a notebook and a workstation. The former is the main front-end to instrumentation, receiving and synchronizing the two main incoming data streams: the US images coming from the ULA-OP system and the 3D positioning data from the motion tracker. It also provides a visual feedback to the operator for the images being acquired. The workstation has substantially higher computational power and storage capacity. It provides back-end support for image post-processing and a repository for the combined imaging datasets. The workstation is also used for the visualization of US and MR images, including the possibility of simultaneous 3D visualization of registered multi-modal images.
A critical requirement for the image acquisition experiments is the synchronization of the two main data streams. The motion tracking and ULA-OP systems are independent instruments that do not yet support an explicit synchronization of activities. Due to this, US image data and position information need to be properly combined to detect the correct 3D position of the US probe at the time each image slice was acquired. For this purpose, a specific logging application has been developed for recording and timestamping in real-time the data supplied by the motion tracking system, by modifying a C++ software component that is included, in this case, in the motion tracker itself. Typically, motion tracking systems feature a low-level API that allows capturing data in real-time and transcribing them to a file.
The adopted synchronization method works as follows. Each entry in the file produced by the logging application is augmented with a timestamp in the format "yyyy-MM-ddThh:mm:ss.kkk", where: y=year, M=month, d=day, h=hour, m=minute, s=second, k=millisecond. The ULA-OP PC-based software (C++ and MATLAB programming languages) computes the starting and ending time of each image acquisition sequence and stores this information in each image in .vtk format. To provide a common temporal reference during the experiments, both the above software procedures are executed on the front-end computer in Figure 3. Timestamps produced in this way are then used by the post-processing software procedures that produce the final dataset (see Protocol, Section 8).
Another specific software component was realized and run on the workstation to provide real-time feedback to the operator, by relating the current US probe position to MR images and, in particular, to the set of predefined poses. A server-side software routine in Python processes the motion tracker log file, translates the current US probe position into a geometric shape, and sends the data to a Paraview server. A Paraview client connects to the same Paraview server and in real-time displays the position of the geometric shape, superimposed on a MR image and to further geometric shapes describing the predefined poses. An example of the resulting real-time visualization is shown in Figure 17.