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Chemistry
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光温度計の作製と試験
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Fabrication and Testing of Photonic Thermometers
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光温度計の作製と試験
DOI:
10.3791/55807-v
•
08:44 min
•
October 24, 2018
•
Nikolai N. Klimov
2
,
Zeeshan Ahmed
1
Joint Quantum Institute
,
University of Maryland
,
2
Physical Measurement Laboratory
,
National Institute of Standards and Technology
Chapters
00:04
Title
01:16
Device Fabrication
02:58
Photonic Chip Alignment
04:28
Photonic Chip Testing
05:00
Bonding of the Optical Fibers
05:49
Packaging of Photonic Thermometer and Temperature Measurement
06:47
Results: Temperature Response of Photonic Sensor
07:39
Conclusion
Summary
Automatic Translation
English (Original)
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Automatic Translation
フォトニック温度計のテストと作製プロセスについて述べる。
Tags
Photonic Thermometers
Photonic Thermometry
Frequency-based Measurements
Temperature Metrology
Optomechanical Temperature Standards
SOI Wafer Fabrication
E-beam Lithography
ICP RIE Etching
Photonic Chip Dicing
V-groove Array Alignment
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