Universiti Kebangsaan Malaysia 1 article published in JoVE Engineering Fabrication of Bi2Te3 and Sb2Te3 Thermoelectric Thin Films using Radio Frequency Magnetron Sputtering Technique Nurfarhana Ahmad Musri1, Yoganash Putthisigamany1, Puvaneswaran Chelvanathan1, Norasikin Ahmad Ludin1, Nadhrah Md Yatim2, Ubaidah Syafiq1 1Solar Energy Research Institute (SERI), Universiti Kebangsaan Malaysia, 2Faculty of Science and Technology, Universiti Sains Islam Malaysia The manuscript describes a protocol for radio frequency magnetron sputtering of Bi2Te3 and Sb2Te3 thermoelectric thin films on glass substrates, which represents a reliable deposition method that provides a wide range of applications with the potential for further development.
