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连续湿法刻蚀法制作不同几何断面烷微流控通道的一步法
 
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连续湿法刻蚀法制作不同几何断面烷微流控通道的一步法

Article DOI: 10.3791/57868
September 13th, 2018

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Summary September 13th, 2018

Please note that all translations are automatically generated.

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对烷微流控器件中嵌入的非矩形截面通道的制作, 有几种方法可供选择。其中大部分涉及多步骤制造和广泛的对准。本文介绍了用烷连续湿法刻蚀法制作不同几何剖面微流控通道的一步法。

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