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Fremstilling af akustiske bølgeenheder til overfladen på lithium-niobate
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Fremstilling af akustiske bølgeenheder til overfladen på lithium-niobate

Article DOI: 10.3791/61013-v • 07:55 min • June 18th, 2020
June 18th, 2020 •
1, 1, 1
1Medically Advanced Devices Laboratory, Center for Medical Devices and Instrumentation, Department of Mechanical and Aerospace Engineering, Jacobs School of Engineering and Department of Surgery, School of Medicine, University of California San Diego

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To fabrikationsteknikker, lift-off og våd ætsning, er beskrevet i fremstilling interdigital elektrode transducere på en piezoelektrisk substrat, lithium niobat, udbredt til at generere overflade akustiske bølger nu finde bred nytte i mikro til nanoskala fluidics. De as-producerede elektroder er vist sig at effektivt fremkalde megahertz orden Rayleigh overflade akustiske bølger.

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Engineering acoustofluidics overflade akustiske bølger lithium niobate interdigital transducere lift-off våd ætsning
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