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Journal / Engineering / Fabricage van plaatsgebonden complexe oxiden
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Fabricage van plaatsgebonden complexe oxiden

Article DOI: 10.3791/50573 • 08:45 min
July 1st, 2013 •
1,2, 1
1Materials Science and Technology Division, Oak Ridge National Laboratory, 2Department of Physics & Astronomy, University of Tennessee, Knoxville

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July 1st, 2013

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We beschrijven het gebruik van gepulste laser depositie (PLD), fotolithografie en wire-bonding technieken micrometer meervoudige oxiden apparaten. Het PLD wordt gebruikt om epitaxiale dunne films te laten groeien. Fotolithografie en wire-bonding technieken worden ingevoerd om praktische hulpmiddelen voor de meting doeleinden te creëren.

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