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Fabricage van Nano-engineered transparante geleidende oxides door gepulste laser depositie
JoVE Journal
Engineering
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JoVE Journal Engineering
Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition
DOI:

10:27 min

February 27, 2013

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Chapters

  • 00:05Title
  • 01:30Substrate Preparation
  • 02:01Laser Alignment and Selection of Laser Parameters
  • 03:33Target Alignment, Pre-ablation and Data Collection for Plasma Plume Length Determination
  • 04:51Calibration of the Film Thickness
  • 05:58Deposition of Compact AZO Films
  • 07:25Deposition of Hierarchically Structured AZO Films
  • 08:08Results: Compact and Forest-like AZO Films and Their Properties
  • 09:39Conclusion

Summary

Automatic Translation

We beschrijven de experimentele methode nanogestructureerde oxide dunne films te deponeren door nanoseconde gepulste laser depositie (PLD) in aanwezigheid van een achtergrondgas. Door deze methode Al gedoteerde ZnO (AZO) films, van compacte hiërarchisch gestructureerd als nano-boom bossen, worden gestort.

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