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Journal / Engineering / 在透射电子显微镜原位时间相关的介质击穿：一种可能性，了解微电子器件的失效机理…
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在透射电子显微镜原位时间相关的介质击穿：一种可能性，了解微电子器件的失效机理
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在透射电子显微镜原位时间相关的介质击穿：一种可能性，了解微电子器件的失效机理

Article DOI: 10.3791/52447-v • 09:26 min • June 26th, 2015
June 26th, 2015 •
1,2, 1, 1,3, 1, 1, 1, 1, 1, 4, 4, 4, 1,2
1Fraunhofer Institute for Ceramic Technologies and Systems, 2Dresden Center for Nanoanalysis, Technische Universität Dresden, 3Globalfoundries Fab 8, 4Globalfoundries Fab 1

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工程，第100，时间依赖介电击穿可靠性，铜互连，降解动力学，
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