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Journal / Engineering / Tillverkning av 3D-kol-mikroelektromekaniska…
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Tillverkning av 3D-kol-mikroelektromekaniska system (C-MEMS)
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Tillverkning av 3D-kol-mikroelektromekaniska system (C-MEMS)

Article DOI: 10.3791/55649-v • 08:01 min • June 17th, 2017
June 17th, 2017 •
1, 1, 1,2, 1,3
1School of Engineering and Sciences, Tecnologico de Monterrey, 2Department of Mechanical and Aerospace Engineering, University of California, 3BBB Inc

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Långa och ihåliga glasiga kolmikrofiber tillverkades baserat på pyrolysen hos en naturlig produkt, humant hår. De två tillverkningsstegen för kolmikroelektromekaniska och kolnanoelektromekaniska system, eller C-MEMS och C-NEMS, är: (i) fotolitografi av en kolrik polymerprekursor och (ii) pyrolys av den mönstrade polymerprekursom.

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Engineering Carbon-MEMS / NEMS glasartat kol tillverkning litografi pyrolys SU8 fotoresist humant hår.
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