In JoVE (1)
Other Publications (0)
Articles by Edward L. Lin in JoVE
Epitaxial Growth of Perovskite Strontium Titanate on Germanium via Atomic Layer Deposition Edward L. Lin1, Bryce I. Edmondson1, Shen Hu1, John G. Ekerdt1 1McKetta Department of Chemical Engineering, The University of Texas at Austin This work details the procedures for the growth and characterization of crystalline SrTiO3 directly on germanium substrates by atomic layer deposition. The procedure illustrates the ability of an all-chemical growth method to integrate oxides monolithically onto semiconductors for metal-oxide semiconductor devices.