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Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition

Article DOI: 10.3791/50297-v • 10:27 min • February 27th, 2013
February 27th, 2013 •
1, 1, 1,2, 1,2, 1
1Department of Energy and NEMAS - Center for NanoEngineered Materials and Surfaces, Politecnico di Milano, 2Center for Nano Science and Technology, Instituto Italiano di Tecnologia

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We describe the experimental method to deposit nanostructured oxide thin films by nanosecond Pulsed Laser Deposition (PLD) in the presence of a background gas. By using this method Al-doped ZnO (AZO) films, from compact to hierarchically structured as nano-tree forests, can be deposited.

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Nano-engineered Transparent Conducting Oxides Pulsed Laser Deposition PLD Metal Oxides Plasma Plume Expansion Dynamics Nanostructured Films Al-doped ZnO AZO Films Transparent Electrodes Photovoltaic Devices O2 Pressure Electrical Conductivity Optical Transparency State Of The Art Transparent Conducting Oxides TCO Room Temperature Deposition Polymers Organic Photovoltaics Light Scattering Hierarchical Structures Haze Factor Light Trapping Capability Technological Applications TiO2 Al2O3 WO3 Ag4O4
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