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Journal / Engineering / Micro-masonry for 3D Additive Micromanufacturing
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Micro-masonry for 3D Additive Micromanufacturing
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Micro-masonry for 3D Additive Micromanufacturing

Article DOI: 10.3791/51974 • 08:45 min
August 1st, 2014 •
1, 1
1Mechanical Science and Engineering, University of Illinois at Urbana-Champaign

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August 1st, 2014

This paper introduces a 3D additive micromanufacturing strategy (termed ‘micro-masonry’) for the flexible fabrication of microelectromechanical system (MEMS) structures and devices. This approach involves transfer printing-based assembly of micro/nanoscale materials in conjunction with rapid thermal annealing-enabled material bonding techniques.

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