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Graphene-Assisted Quasi-van der Waals Epitaxy of AlN Film on Nano-Patterned Sapphire Substrate for Ultraviolet Light Emitting Diodes
 

Graphene-Assisted Quasi-van der Waals Epitaxy of AlN Film on Nano-Patterned Sapphire Substrate for Ultraviolet Light Emitting Diodes

Article DOI: 10.3791/60167-v
June 25th, 2020

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Summary June 25th, 2020

A protocol for graphene-assisted growth of high-quality AlN films on nano-patterned sapphire substrate is presented.

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