JoVE Journal
Engineering
Engineering
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その場での透過型電子顕微鏡での時間依存絶縁破壊:マイクロエレクトロニクスデバイスの故障メカニズムを理解することが可能
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Article
DOI:
10.3791/52447-v
•
09:26 min
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June 26th, 2015
その場での透過型電子顕微鏡での時間依存絶縁破壊:マイクロエレクトロニクスデバイスの故障メカニズムを理解することが可能
June 26th, 2015
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