Sintesi e caratterizzazione di alta c-asse ZnO film sottile da potenziato a plasma Chemical Vapor Deposition del sistema e la sua applicazione Rilevatori UV
We offered a method to directly synthesize high c-axis (0002) ZnO thin film by plasma enhanced chemical vapor deposition. The as-synthesized ZnO thin film combined with Pt interdigitated electrode was used as sensing layer for ultraviolet photodetector, showing a high performance through a combination of its good responsivity and reliability.