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Aerosol-assisted Chemical Vapor Deposition of Metal Oxide Structures: Zinc Oxide Rods
JoVE Journal
Chemistry
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JoVE Journal Chemistry
Aerosol-assisted Chemical Vapor Deposition of Metal Oxide Structures: Zinc Oxide Rods

Aerosol-assisted Chemical Vapor Deposition of Metal Oxide Structures: Zinc Oxide Rods

DOI:
10.3791/56127-v

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06:39 min

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September 14, 2017

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, , , ,
1Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), 2SIX Research Centre,Brno University of Technology, 3Institute of Physics of Material,Academy of Science of Czech Republic, 4Institute of Physical Engineering and Central European Institute of Technology,Brno University of Technology

Chapters

  • 00:05Title
  • 00:51Preparation of Substrates and Set-up of Deposition Temperature
  • 02:08Preparation of Solution for Aerosol Generation
  • 03:02Chemical Vapor Deposition Process
  • 04:00Results: Characterization of Zinc Oxide Rods Deposited on Silicon Substrates via Chemical Vapor Deposition
  • 05:39Conclusion

Summary

Automatic Translation

Automatic Translation

Columnar zinc oxide structures in the form of rods are synthesized via aerosol-assisted chemical vapor deposition without the use of pre-deposited catalyst-seed particles. This method is scalable and compatible with various substrates based on either silicon, quartz or polymers.

Tags

Keywords: Aerosol-assisted Chemical Vapor DepositionMetal Oxide StructuresZinc Oxide RodsSilicon SubstrateCatalyst-free GrowthLow-temperature DepositionGas Sensors

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