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Aerosol-assisted Chemical Vapor Deposition of Metal Oxide Structures: Zinc Oxide Rods

Article DOI: 10.3791/56127-v • 06:39 min • September 14th, 2017
September 14th, 2017 •
1,2, 3, 4, 1, 1
1Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), 2SIX Research Centre, Brno University of Technology, 3Institute of Physics of Material, Academy of Science of Czech Republic, 4Institute of Physical Engineering and Central European Institute of Technology, Brno University of Technology

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Columnar zinc oxide structures in the form of rods are synthesized via aerosol-assisted chemical vapor deposition without the use of pre-deposited catalyst-seed particles. This method is scalable and compatible with various substrates based on either silicon, quartz or polymers.

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Aerosol-assisted Chemical Vapor Deposition Metal Oxide Structures Zinc Oxide Rods Silicon-based Micro-machine Platforms Catalyst Seeds Columnar Metal Oxide Structures Catalyzer Vapor Solid Mechanist Processing Temperatures Substrates Silicon Substrate Isopropanol Deionized Water Nitrogen Stainless Steel Cylindrical Reaction Cell Gas Sensors Shadow Mask
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