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Proof-of-Concept for Gas-Entrapping Membranes Derived from Water-Loving SiO2/Si/SiO2 Wafers for Green Desalination
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Proof-of-Concept for Gas-Entrapping Membranes Derived from Water-Loving SiO2/Si/SiO2 Wafers for Green Desalination

Article DOI: 10.3791/60583-v • 09:39 min • March 1st, 2020
March 1st, 2020 •
1, 1, 1, 1, 2, 2, 1
1Water Desalination and Reuse Center (WDRC), Biological and Environmental Science and Engineering (BESE) Division, King Abdullah University of Science and Technology (KAUST), 2Core Labs, King Abdullah University of Science and Technology (KAUST)

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Presented here is a stepwise protocol for realizing gas-entrapping membranes (GEMs) from SiO2/Si wafers using integrated circuit microfabrication technology. When silica-GEMs are immersed in water, the intrusion of water is prevented, despite the water-loving composition of silica.

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Gas-entrapping Membranes GEMs Water-loving SiO2/Si/SiO2 Wafers Green Desalination Membrane Distillation Photolithography Overhanging Architectures Silicon Wafer Micro-fabrication Techniques Alignment Marks Multi-scale Alignment Marks Pole Diameter Silica GEMS Design Patterns Mask Development Piranha Solution Deionized Water Nitrogen Environment HMDS Vapor Adhesion Of Photoresist Spin Coater AZ 521
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