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Proof-of-Concept for Gas-Entrapping Membranes Derived from Water-Loving SiO2/Si/SiO2 Wafers for Green Desalination
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Proof-of-Concept for Gas-Entrapping Membranes Derived from Water-Loving SiO2/Si/SiO2 Wafers for Green Desalination

Proof-of-Concept for Gas-Entrapping Membranes Derived from Water-Loving SiO2/Si/SiO2 Wafers for Green Desalination

DOI:
10.3791/60583-v

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09:39 min

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March 01, 2020

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, , , , , ,
1Water Desalination and Reuse Center (WDRC), Biological and Environmental Science and Engineering (BESE) Division,King Abdullah University of Science and Technology (KAUST), 2Core Labs,King Abdullah University of Science and Technology (KAUST)

Chapters

  • 00:05Introduction
  • 01:04Wafer Cleaning, Hexamethyldisilane (HMDS) Deposition, and Lithography
  • 03:28Sputter, Photoresist Lift-off and Processing, Manual back Alignment, and Lithography on the Backside of the Wafer
  • 04:46Etching and Final Cleaning
  • 07:41Results: Immersing Silica-GEMs in Water
  • 09:02Conclusion

Summary

Automatic Translation

Automatic Translation

Presented here is a stepwise protocol for realizing gas-entrapping membranes (GEMs) from SiO2/Si wafers using integrated circuit microfabrication technology. When silica-GEMs are immersed in water, the intrusion of water is prevented, despite the water-loving composition of silica.

Tags

Keywords: Gas-entrapping MembranesGEMsDesalinationMembrane DistillationPhotolithographyMicro-fabricationSilicon WaferSilicaHMDSPhotoresistUV ExposureMask AlignmentNegative ToneCross-linking

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