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气体夹膜的概念验证，源自爱水的SiO 2/Si/SiO2晶圆，用于绿色海水淡化
JoVE Journal
Engineering
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JoVE Journal Engineering
Proof-of-Concept for Gas-Entrapping Membranes Derived from Water-Loving SiO2/Si/SiO2 Wafers for Green Desalination
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气体夹膜的概念验证，源自爱水的SiO 2/Si/SiO2晶圆，用于绿色海水淡化

DOI:
10.3791/60583-v

•

09:39 min

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March 01, 2020

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, , , , , ,
1Water Desalination and Reuse Center (WDRC), Biological and Environmental Science and Engineering (BESE) Division,King Abdullah University of Science and Technology (KAUST), 2Core Labs,King Abdullah University of Science and Technology (KAUST)

Chapters

  • 00:05Introduction
  • 01:04Wafer Cleaning, Hexamethyldisilane (HMDS) Deposition, and Lithography
  • 03:28Sputter, Photoresist Lift-off and Processing, Manual back Alignment, and Lithography on the Backside of the Wafer
  • 04:46Etching and Final Cleaning
  • 07:41Results: Immersing Silica-GEMs in Water
  • 09:02Conclusion

Summary

Automatic Translation

Automatic Translation

此处介绍了一种使用集成电路微加工技术从 SiO2/Si 晶圆中实现气体环膜 （GEM） 的逐步方案。当二氧化硅-GEM浸入水中时，尽管二氧化硅的成分是爱水的，但水的侵入是可以避免的。

Tags

Gas-entrapping MembranesGEMsDesalinationMembrane DistillationPhotolithographyMicro-fabricationSilicon WaferSilicaHMDSPhotoresistUV ExposureMask AlignmentNegative ToneCross-linking

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