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Fabrikasjon av Surface Acoustic Wave-enheter på Litium Niobate
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Fabrikasjon av Surface Acoustic Wave-enheter på Litium Niobate

Article DOI: 10.3791/61013-v • 07:55 min • June 18th, 2020
June 18th, 2020 •
1, 1, 1
1Medically Advanced Devices Laboratory, Center for Medical Devices and Instrumentation, Department of Mechanical and Aerospace Engineering, Jacobs School of Engineering and Department of Surgery, School of Medicine, University of California San Diego

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To fabrikasjonsteknikker, lift-off og våt etsing, er beskrevet i å produsere interdigitale elektrodetransdusere på et piezoelektrisk substrat, litiumniobate, mye brukt til å generere overflateakustiske bølger som nå finner bredt verktøy i mikro til nanoskalavæske. De som produserte elektrodene er vist å effektivt indusere megahertz rekkefølge Rayleigh overflate akustiske bølger.

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Engineering acoustofluidics overflate akustiske bølger litium niobate interdigitale transdusere lift-off våt etsing
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