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Analyse av kontaktlinser grensesnitt for Single Gan nanowire Devices
JoVE Journal
Engineering
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JoVE Journal Engineering
Analysis of Contact Interfaces for Single GaN Nanowire Devices
DOI:

11:13 min

November 15, 2013

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Chapters

  • 00:05Title
  • 01:32Wafer Preparation
  • 03:14Photolithography of Contact Pattern
  • 04:55Electron-beam Evaporation of Contact Metals
  • 06:29Contact Metal Lift-off and Annealing
  • 07:38Ni/Au Film Removal
  • 09:04Results: Annealed Ni/Au Films Removed with Carbon Tape
  • 10:45Conclusion

Summary

Automatic Translation

En teknikk ble utviklet som fjerner Ni / Au metallkontakt filmer fra deres substrat for å tillate undersøkelse og karakterisering av kontakt / substrat og kontakt / NW grensesnitt av enkelt Gan nanowire enheter.

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