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In Situ Zeitabhängige Dielectric Breakdown im Transmissionselektronenmikroskop
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In Situ Zeitabhängige Dielectric Breakdown im Transmissionselektronenmikroskop: eine Möglichkeit, die Fehlermechanismus in mikroelektronischen Bauelementen Verstehen

Article DOI: 10.3791/52447
June 26th, 2015


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