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一种新的方法<em>原位</em>纳米级样品的机电表征
JoVE Journal
Engineering
This content is Free Access.
JoVE Journal
Engineering
A Novel Method for
In Situ
Electromechanical Characterization of Nanoscale Specimens
Please note that all translations are automatically generated.
Click here for the English version.
一种新的方法<em>原位</em>纳米级样品的机电表征
DOI:
10.3791/55735-v
•
07:15 min
•
June 02, 2017
•
Russell C. Reid
2
,
Alberto Piqué
,
Wonmo Kang
3
1
Materials Science and Technology Division
,
US Naval Research Laboratory
,
2
American Society for Engineering Education—Naval Research Laboratory (ASEE-NRL)
,
3
Leidos Corporation
Chapters
00:05
Title
00:45
Microfabrication of Silicon Frames
02:13
Laser Patterning of Metal Copper Specimens
03:38
Microdevice-based Electromechanical Testing Systems (MEMTS) Assembly
04:38
In Situ
Transmission Electron Microscopy (TEM) Experiments
05:52
Results:
In Situ
Electromechanical Characterization of a Single-crystal Copper Specimen
06:50
Conclusion
Summary
Automatic Translation
English (Original)
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Automatic Translation
使用宏观样品,隔离电气和热效应对电辅助变形(EAD)是非常困难的。已经开发了金属样品微观和纳米结构以及定制测试程序,以评估施加的电流对形成的影响,而不会有焦耳加热和这些样品上位错的演变。
Tags
Nanoscale
TEM
In-situ
Electromechanical Characterization
Silicon Wafer
Deep Reactive Ion Etching
Silicon Dioxide
Copper Foil
Photoresist
Laser Cutting
Ferric Chloride
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