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Fabrication of Surface Acoustic Wave Devices on Lithium Niobate
 

Fabrication of Surface Acoustic Wave Devices on Lithium Niobate

Article doi: 10.3791/61013
June 18th, 2020 Usage Statistics

Summary June 18th, 2020

Two fabrication techniques, lift-off and wet etching, are described in producing interdigital electrode transducers upon a piezoelectric substrate, lithium niobate, widely used to generate surface acoustic waves now finding broad utility in micro to nanoscale fluidics. The as-produced electrodes are shown to efficiently induce megahertz order Rayleigh surface acoustic waves. 

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