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DOI: 10.3791/57023-v
Jizhou Jiang1,2, Calvin Pei Yu Wong2,3, Wenjing Zhang1, Andrew Thye Shen Wee2,4
1SZU-NUS Collaborative Innovation Center for Optoelectronic Science & Technology, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, College of Optoelectronic Engineering,Shenzhen University, 2Department of Physics,National University of Singapore, 3NUS Graduate School for Integrative Sciences and Engineering,Centre for Life Sciences, 4Centre for Advanced 2D Materials and Graphene Research Centre,National University of Singapore
A protocol is presented demonstrating a two-step fabrication technique to grow large-sized single-layer rectangular shaped SnSe flakes on low-cost SiO2/Si dielectrics wafers in an atmospheric pressure quartz tube furnace system.
The overall goal of the synthetic method of combining a vapor transport deposition technique and nitrogen etching method in an atmospheric pressure system is to demonstrate fabrication of high-quality, large-sized single-layer materials on dielectric substrates. This method provides a general structure for the growth of two-dimensional lines the size of single-layer materials, such as as tin sulfide, germanium selenide, and indium telleride. The main advantage of this technique is that that large-size single-layer flakes can be grown on low-cost silicon dioxide silicon dielectrics with a vapor transport deposition technique and the nitrogen etching method in an atmospheric pressure system.
The implications of this technique extend towards the fabrication of other two-dimensional materials because the self-limiting nitrogen etching method can be beneficial to the formation of single layers on both. I first had the idea for this method when I carried out the growth of tungsten diselenide, tin selenide, high-production under nitrogen atmosphere and found that nitrogen etches the material. First, set the target temperature of a horizontal tube furnace to 560 degrees Celsius for one hour and run the furnace.
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