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Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
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1Medically Advanced Devices Laboratory, Center for Medical Devices, Department of Mechanical and Aerospace Engineering, Jacobs School of Engineering and Department of Surgery, School of Medicine,University of California San Diego, 2Department of Surgery, School of Medicine,University of California San Diego
Chapters
- 00:04Introduction
- 01:03Electrical and Mechanical Transducer Contact
- 01:48Resonance Frequency Identication
- 02:26Vibration Characterization
- 04:02Fluid Supply System Fabrication
- 05:21Dynamics Observation
- 06:33Droplet Size Measurement
- 09:01RESULTS: Representative Device Characterization
- 09:53Conclusion
Fabrication of piezoelectric thickness mode transducers via direct current sputtering of plate electrodes on lithium niobate is described. Additionally, reliable operation is achieved with a transducer holder and fluid supply system and characterization is demonstrated via impedance analysis, laser doppler vibrometry, high-speed imaging, and droplet size distribution using laser scattering.
Tags
Keywords:
Piezoelectric DevicesThickness ModeAtomizationAcoustofluidicsResonance FrequencyVibrational ModeVibration AmplitudeTransducersPneumoniaCapillary WavesContinuous AtomizationPower InputWick PositionWick OrientationCustom Transducer HolderSurface Mount Spring ContactsPrinted Circuit BoardsImpedance AnalysisNetwork AnalyzerLDVPogo Plate ContactVibration Amplitude
